Dual Beam ™

FEI's Helios NanoLab 660 Dual Beam

  • 30kV STEM
  • TEM liftout (Easylift ™) Nanomanipulator
  • Thin TEM samples 30nm-100nm
  • Multi Chem with C and Pt deposition and C and insulator milling chemistries
Low <1kV TEM lamella
30kV STEM
FESEM Cross Section

FEI's best Electron and Ion Optics

  • STEM and S/TEM capabilities
  • Multi Chem with C and Pt deposition and C and insulator milling chemistries
  • TEM liftout (Easylift ™) Nanomanipulator
  • Extreme high resolution imaging